A Two-Row Interdigitating-Finger Repulsive-Torque Electrostatic Actuator and …

Abstract—This paper presents a novel two-row interdigitatingfinger repulsive-torque electrostatic actuator and its application to the micromirror vector display. The actuator consists of upper and lower rotation units and an output beam. Each unit has one row of rotation fingers, i.e., the lower and upper rotation fingers, which interdigitate with each other. The lower and upper rotation fin…