In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

Abstract—This paper presents a new design and a complete characterization of amplitude-modulation gyroscopes based on piezoresistive nanogauges. The working principle and optimization criteria of in-plane and out-of-plane devices relying on double frame decoupling and levered sense mode are discussed in light of sensitivity and resolution theoretical predictions. The architecture of driving …