Production Planning and WIP Assignment for Wafer Fabrication Tools With Avail…

Abstract—This paper deals with a short-term production plan of a single toolset during a shift at a semiconductor fabrication plant. We propose a cost-based optimization model that seeks to minimize the cost of the shift while meeting the following conditions: 1) the shift produces its required output, measured in work-in-process (WIP) levels; 2) preventive maintenance (PM) tasks are carried …