Pulse-Echo Ultrasound Imaging Using an AlN Piezoelectric Micromachined Ultras…

Abstract—This work demonstrates short-range and highresolution ultrasonic imaging using 8 MHz aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducer (PMUT) arrays, which are compatible with complementary metal-oxide semiconductor circuitry and wafer-level mass manufacture. Because AlN has a low dielectric constant, the PMUTs have low capacitance and a custom 1.8 V interface…