Fabrication and characterization of positive and negative copper sulfide micr…

Abstract. Positive and negative micropatterned copper sulfide thin films were successfully fabricated through chemical bath deposition methods. The thin films were deposited on patterned Si substrates with two different self-assembled monolayers (SAMs), i.e., NH2/CH3 and NH2/OH terminated silane, respectively. Under an optimal depositing condition, the copper sulfide thin films were selecti…