e-journal

Structure and dielectric properties of barium titanate thin films for capacitor applications

---

Abstract.
BaTiO3 is a typical ferroelectric material with high relative permittivity and has been used for various applications, such as multilayer ceramic capacitors (MLCCs). With the tendency of miniaturization of MLCCs, the thin films of BaTiO3 have been required. In this work, BaTiO3 thin films have been deposited on Pt-coated Si substrates by RF magnetron sputtering under different deposition conditions. The films deposited at the substrate temperature from 550 oC–750 oC show a pure tetragonal perovskite structure. The films deposited at 550 oC–625 oC exhibit (111) preferential orientation, and change to (110) preferential orientation when deposited above 650 oC. The film morphologies vary with working pressure and substrate temperature. The film deposited at 625 oC and 4.5 Pa has the relative permittivity of 630 and the loss tangent of 2% at 10 kHz.

Keywords: A. Films; C. Dielectric properties; D. BaTiO3; E. Capacitors

---

Ketersediaan

Tidak ada salinan data

Informasi Detail

Judul Seri

Ceramics International

No. Panggil

-

Penerbit

New York : Elsevier Ltd and Techna Group S.r.l.., 2013

Deskripsi Fisik

Ceramics International 39 (2013) S481–S485

Bahasa

English

ISBN/ISSN

-

Klasifikasi

-

Tipe Isi

-

Tipe Media

-

Tipe Pembawa

-

Edisi

39 (2013) S481–S485

Subjek

FISIKA MATERIAL

Info Detail Spesifik

-

Pernyataan Tanggungjawab

agus

Versi lain/terkait

Lampiran Berkas

Komentar

---

Anda harus masuk sebelum memberikan komentar