e-journal

Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing

---

Abstract—This paper studies the challenging problem of scheduling single-arm multi-cluster tools with wafer residency time constraints. They have a linear topology and their bottleneck tool is process-bound. This work aims to find an optimal one-wafer cyclic schedule. With the Petri net model developed
in our previous work and the minimal cycle time for a multicluster tool without wafer residency time constraints, it derives the necessary and sufficient schedulability conditions for multicluster
tools with wafer residency time constraints for the first time. Then, it gives an algorithm to find an optimal one-wafer cyclic schedule if schedulable. This is done by simply setting the robots’ waiting time for each tool. Thus, it is very computationally efficient and applicable to practical problems. An example is presented to illustrate the proposed method.

Index Terms—Cluster tool, Petri net, scheduling, semiconductor manufacturing.

---

Ketersediaan

Tidak ada salinan data

Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 1, FEBRUARY 2015

No. Panggil

-

Penerbit

: IEEE., 2015

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 1, FEBRUARY 2015

Bahasa

English

ISBN/ISSN

0894-6507

Klasifikasi

-

Tipe Isi

-

Tipe Media

-

Tipe Pembawa

-

Edisi

VOL. 28, NO. 1, FEBRUARY 2015

Subjek

SEMIKONDUKTOR

Info Detail Spesifik

-

Pernyataan Tanggungjawab

ETY

Versi lain/terkait

Lampiran Berkas

Komentar

---

Anda harus masuk sebelum memberikan komentar