A Strategy to Characterize Nanofabrication Processes With Large RPM (Experime…

Abstract The bottom-up fabrication of nanostructures can simultaneously face large uncertainties from experimental runs (R), physical understanding (P), and measurement (M). No systematic strategy has been reported to manage these three types of uncertainties, abbreviated as RPM, concurrently to achieve better understanding of nano fabrication processes. Previously, we developed cross-domain m…