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Ditemukan 3 dari pencarian Anda melalui kata kunci: author=Qiang Huang
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EM Estimation of Nanostructure Interactions With Incomplete Feature Measureme…
Komentar Bagikan
Qiang HuangLijuan Xu

Automatic assessment of nanostructure quality is essential for scale-up nanomanufacturing. In our previous work, we have developed a method to quantify nanostructure growth quality and detect structural defects through interaction analysis. However, because the method builds on complete feature measurement, its direct application to nanomanufacturing systems is severely constrained by nanostru…

Edisi
VOL. 10, NO. 3
ISBN/ISSN
-
Deskripsi Fisik
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 10, NO. 3, JULY 2013
Judul Seri
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
No. Panggil
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Cross-Domain Model Building and Validation (CDMV): A New Modeling Strategy to…
Komentar Bagikan
Li WangQiang Huang

Understanding nanostructure growth faces issues of limited data, lack of physical knowledge, and large process uncertainties. These issues result in modeling difficulty because a large pool of candidate models almost fit the data equally well. Through the Integrated Nanomanufacturing and Nanoinformatics (INN) strategy, we derive the process models from physical and statistical domains, respect…

Edisi
VOL. 10, NO. 3
ISBN/ISSN
-
Deskripsi Fisik
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 10, NO. 3, JULY 2013
Judul Seri
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
No. Panggil
-
cover
A Strategy to Characterize Nanofabrication Processes With Large RPM (Experime…
Komentar Bagikan
Li WangQiang Huang

Abstract The bottom-up fabrication of nanostructures can simultaneously face large uncertainties from experimental runs (R), physical understanding (P), and measurement (M). No systematic strategy has been reported to manage these three types of uncertainties, abbreviated as RPM, concurrently to achieve better understanding of nano fabrication processes. Previously, we developed cross-domain m…

Edisi
VOL. 29, NO. 1, FEBRUARY 2016
ISBN/ISSN
0894-6507
Deskripsi Fisik
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 29, NO. 1, FEBRUARY 2016
Judul Seri
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 29, NO. 1, FEBRUARY 2016
No. Panggil
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