EM Estimation of Nanostructure Interactions With Incomplete Feature Measureme…

Automatic assessment of nanostructure quality is essential for scale-up nanomanufacturing. In our previous work, we have developed a method to quantify nanostructure growth quality and detect structural defects through interaction analysis. However, because the method builds on complete feature measurement, its direct application to nanomanufacturing systems is severely constrained by nanostru…