Investigation Into the Quality Factor of Piezoelectric-on-Silica Micromachine…

Abstract—In this paper, we investigate loss mechanisms in piezoelectric-on-silica bulk acoustic wave resonators, including those resulting from thermoelastic damping (TED), surface roughness, and supporting tethers. Alternate resonator designs, piezoelectric materials, and fabrication processes are demonstrated to empirically test these loss mechanisms. Quality factors (Qs) in the order of �…