Ditapis dengan
Investigation Into the Quality Factor of Piezoelectric-on-Silica Micromachine…
Abstract—In this paper, we investigate loss mechanisms in piezoelectric-on-silica bulk acoustic wave resonators, including those resulting from thermoelastic damping (TED), surface roughness, and supporting tethers. Alternate resonator designs, piezoelectric materials, and fabrication processes are demonstrated to empirically test these loss mechanisms. Quality factors (Qs) in the order of �…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
A Temperature-Stable Piezoelectric MEMS Oscillator Using a CMOS PLL Circuit f…
Abstract—In this paper, design, analysis, and implementation of a piezoelectric microelectromechanical systems (MEMS) oscillator on an ovenized microplatform is presented. An oxiderefill process is used to compensate the first-order temperature coefficient of frequency of MEMS resonators, as well as to realize thermal isolation structures. The technology enables fabrication of low-power oveni…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Karya Umum 
Filsafat 
Agama 
Ilmu-ilmu Sosial 
Bahasa 
Ilmu-ilmu Murni 
Ilmu-ilmu Terapan 
Kesenian, Hiburan, dan Olahraga 
Kesusastraan 
Geografi dan Sejarah