Ditapis dengan
Pull-In Voltage and Fabrication Yield Analysis of All-Metal-Based Nanoelectro…
Abstract—We designed a one-mask process for all-molybdenum-based laterally actuated anoelectromechanical switches. The damascene-like process is designed to ensure a smooth, high-aspect ratio, and metal-to-metal mechanical contact. Based on the statistical study of 800 devices, very high process yield can be achieved for fixed–fixed beam devices by selecting suitable device dimensions, i.…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- Judul Seri
- -
- No. Panggil
- -
Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated …
Abstract—We report on characterization of Si-to-Si contact microswitches fabricated in an ultraclean encapsulation process. This three-terminal microswitch relies on a curved beam (source) that actuates toward the contact terminal (drain) by charging the control terminal (gate). The operation range of this switch from −60 °C to 300 °C is investigated, which approximately yields a resistan…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
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