Pull-In Voltage and Fabrication Yield Analysis of All-Metal-Based Nanoelectro…

Abstract—We designed a one-mask process for all-molybdenum-based laterally actuated anoelectromechanical switches. The damascene-like process is designed to ensure a smooth, high-aspect ratio, and metal-to-metal mechanical contact. Based on the statistical study of 800 devices, very high process yield can be achieved for fixed–fixed beam devices by selecting suitable device dimensions, i.…