Through-Silicon-Via Fabrication Technologies, Passives Extraction, and Electr…

Abstract—Major advances have been made in the processing technologies of through-silicon-vias (TSVs) because TSV is an essential element for both wafer-level 3-D integration and packaging-based 3-D integration, due to its short interconnect length, high interconnect density, and small footprint. Based on a review of current TSV technologies, this paper reports a number of recently developed e…