Ditapis dengan
Optimization of ICPCVD Amorphous Silicon for Optical MEMS Applications
Abstract—In this paper, we present the optimization of optical and mechanical properties of inductively coupled plasma chemical vapor deposited (ICPCVD) amorphous silicon thin films for fabrication of high-quality optical microelectromechanical systems-based devices operating from visible to short-wave infrared wavelengths (450–3000 nm). Our results indicate that, at relatively high deposi…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- Judul Seri
- -
- No. Panggil
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2-D Electrostatic Actuation of Microshutter Arrays
Abstract—Electrostatically actuated microshutter arrays consisting of rotational microshutters (shutters that rotate about a torsion bar) were designed and fabricated through the use of models and experiments. Design iterations focused on minimizing the torsional stiffness of the microshutters while maintaining their structural integrity. Mechanical and electromechanical test systems were con…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
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Correlational Study Between SiN Etch Rate and Plasma Impedance in Electron Cy…
Abstract The correlation between the change in the etching rate of SiN and the change in the monitored plasma impedance was investigated to estimate the capability of critical dimension (CD) prediction with a plasma impedance monitor (PIM). The results obtained with the PIM were compared with those of optical emission spectroscopy (OES), which was performed using the emission intensity ratio …
- Edisi
- VOL. 28, NO. 3, AUGUST 2015
- ISBN/ISSN
- 0894-6507
- Deskripsi Fisik
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 3, AUGUST 2015
- Judul Seri
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 3, AUGUST 2015
- No. Panggil
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Survey on Free Space Optical Communication: A Communication Theory Perspective
Abstract Optical wireless communication (OWC) refers to transmission in unguided propagation media through the use of optical carriers, i.e., visible, infrared (IR), and ultraviolet (UV) bands. In this survey, we focus on outdoor terrestrial OWC links which operate in near IR band. These are widely referred to as free space optical (FSO) communication in the literature. FSO systems are used f…
- Edisi
- -
- ISBN/ISSN
- 1553-877X
- Deskripsi Fisik
- IEEE COMMUNICATION SURVEYS & TUTORIALS, VOL. 16, NO. 4, FOURTH QUARTER 2014
- Judul Seri
- IEEE COMMUNICATION SURVEYS & TUTORIALS, VOL. 16, NO. 4, FOURTH QUARTER 2014
- No. Panggil
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