Ditapis dengan
Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types
We examine a scheduling problemof cluster tools that concurrently process two wafer types in a cyclic operational sequence. Whereas the process steps for different wafer types are assigned to different processing modules (PMs), the wafer loading and unloading tasks at the PMs are performed by a single robot. For a given cycle plan, which is a mix of different wafers for each cycle, we wish to d…
- Edisi
- VOL. 11, NO. 2, APRIL 2014
- ISBN/ISSN
- 1545-5955
- Deskripsi Fisik
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 11, NO. 2, APRIL 2014
- Judul Seri
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
- No. Panggil
- -
Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm
Abstract—Cluster tools, each of which consists of multiple processing modules, one material handling robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography, etching, and deposition. There have been many approaches and algorithms for cyclic scheduling of cluster tools in which the robot repeats a specified sequence for processing identical wafers. However, t…
- Edisi
- 1545-5955
- ISBN/ISSN
- 1545-5955
- Deskripsi Fisik
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 12, NO. 2, APRIL 2015
- Judul Seri
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
- No. Panggil
- -
A Branch and Bound Algorithm for Cyclic Scheduling of Timed Petri Nets
A timed Petri net (TPN) has been widely used for modeling, scheduling, and analyzing discrete event dynamic systems. This study examines cyclic scheduling problems of a TPN to minimize the cycle time especially for automated manufacturing systems. Appropriate token routing at each conflict place canmake a TPN repeat an identical firing sequence.We propose a systematic procedure to transform a …
- Edisi
- VOL. 12, NO. 1, JANUARY 2015
- ISBN/ISSN
- 1545-5955
- Deskripsi Fisik
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 12, NO. 1, JANUARY 2015
- Judul Seri
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
- No. Panggil
- -
Noncyclic Scheduling for Timed Discrete-Event Systems With Application to Sin…
Recently, semiconductor manufacturing fabs tend to reduce the wafer lot size, down to just a few. Consequently, the wafer recipe or wafer flow pattern changes frequently. For such problems, it is impossible to apply conventional prevalent cyclic scheduling methods that repeat processing of wafers in an identical cyclic tool operation sequence.We therefore consider the noncyclic scheduling probl…
- Edisi
- VOL. 10, NO. 3
- ISBN/ISSN
- -
- Deskripsi Fisik
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 10, NO. 3, JULY 2013
- Judul Seri
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
- No. Panggil
- -
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