Ditapis dengan
Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types
We examine a scheduling problemof cluster tools that concurrently process two wafer types in a cyclic operational sequence. Whereas the process steps for different wafer types are assigned to different processing modules (PMs), the wafer loading and unloading tasks at the PMs are performed by a single robot. For a given cycle plan, which is a mix of different wafers for each cycle, we wish to d…
- Edisi
- VOL. 11, NO. 2, APRIL 2014
- ISBN/ISSN
- 1545-5955
- Deskripsi Fisik
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 11, NO. 2, APRIL 2014
- Judul Seri
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
- No. Panggil
- -
Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm
Abstract—Cluster tools, each of which consists of multiple processing modules, one material handling robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography, etching, and deposition. There have been many approaches and algorithms for cyclic scheduling of cluster tools in which the robot repeats a specified sequence for processing identical wafers. However, t…
- Edisi
- 1545-5955
- ISBN/ISSN
- 1545-5955
- Deskripsi Fisik
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 12, NO. 2, APRIL 2015
- Judul Seri
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
- No. Panggil
- -
A Branch and Bound Algorithm for Cyclic Scheduling of Timed Petri Nets
A timed Petri net (TPN) has been widely used for modeling, scheduling, and analyzing discrete event dynamic systems. This study examines cyclic scheduling problems of a TPN to minimize the cycle time especially for automated manufacturing systems. Appropriate token routing at each conflict place canmake a TPN repeat an identical firing sequence.We propose a systematic procedure to transform a …
- Edisi
- VOL. 12, NO. 1, JANUARY 2015
- ISBN/ISSN
- 1545-5955
- Deskripsi Fisik
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 12, NO. 1, JANUARY 2015
- Judul Seri
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
- No. Panggil
- -
Non-Cyclic Scheduling of a Wet Station
We examine a non-cyclic scheduling problem of a wet station that performs cleaning processes for removing residual contaminants on wafer surfaces. Several chemical and rinse baths, and multiple robots for transporting jobs are linearly combined in a wet station. A wet station in a fab tends to have different types of jobs. Therefore, it is realistic to consider non-cyclic release of jobs into a…
- Edisi
- VOL. 11, NO. 4
- ISBN/ISSN
- -
- Deskripsi Fisik
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 11, NO. 4, OCTOBER 2014
- Judul Seri
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
- No. Panggil
- -
Scheduling In-Line Multiple Cluster Tools
Abstract—A cluster tool which is widely used for wafer fabrication processes consists of several processing modules (PMs), a transport robot, loadlocks, and an equipment front-end module (EFEM) in which a wafer cassette is loaded and unloaded. A wafer cassette with 25 identical wafers is transported by an overhead hoist transfer (OHT) between cluster tools and stored in a stocker when the co…
- Edisi
- VOL. 28, NO. 2, MAY 2015
- ISBN/ISSN
- 0894-6507
- Deskripsi Fisik
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 2, MAY 2015
- Judul Seri
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 2, MAY 2015
- No. Panggil
- -
Makespan Analysis of Lot Switching Period in Cluster Tools
Abstract Cluster tools each of which consists of processing modules (PMs), a transport robot and loadlocks perform most wafer fabrication processes in semiconductor manufacturing. Recently, the lot size has been decreasing from 25 wafers to even 7-8 wafers due to the larger wafer size and circuit width reduction especially in large scale integration (LSI) manufacturing. Hence, the lot switchin…
- Edisi
- -
- ISBN/ISSN
- 0894-6507
- Deskripsi Fisik
- -
- Judul Seri
- -
- No. Panggil
- -
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