Manufacturing Challenges of GaN-on-Si HEMTs in a 200mm CMOS Fab

Abstract In this paper, we report on the challenges related to growth and processing of 200mm GaN-on-Si wafers in a CMOS fab. We describe the Au free process we developed as well as how we assure wafer quality prior processing. For the first time, we analyze possible Ga contamination issues related to the processing of GaN wafers and we present the cleaning procedures we developed to avoid it…

In Search of “Forever,” Continued Transistor Scaling One New Material at …

Abstract This work looks at past, present, and future material changes for the metal–oxide–semiconductor field-effect transistor (MOSFET). It is shown that conventional planar bulk MOSFET channel length scaling, which has driven the industry for the last 40 years, is slowing. To continue Moore’s law, new materials and structures are required. The first major material change to extend Moo…

Implementation of Tungsten Metallization In Multilevel Interconnection Techno…

Abstract The techniques of experimental design and response-surface methodology have been used to produce empirical models of the deposition and etchback of tungsten in commercially available reactors for a tungsten plug technology. Deposition was carried out in a Genus 8402 LPCVD batch reactor by the Hz reduction of WF,. Responsesurfaces for deposition rate, sheet resistance uniformity, resi…

Impacts of Differences in Epidemiological Case Definitions on Prevalence for …

evaluate prevalence based on variations in case definitions used for epidemiological studies of musculoskeletal disorders (MSDs). Background: Prior studies of MSDs have mostly relied on a single case definition based on questionnaires. Method: In a multicenter prospective cohort study, we systematically collected data to evaluate impacts of differences in case definitions of MSDs on prevalenc…

Health Index Extraction Methods for Batch Processes in Semiconductor Manufact…

Abstract This paper deals with a study of three methods for health index (HI) extraction in semiconductor manufacturing equipments. The first method uses degradation reconstruction-based identification with basic principal component analysis (PCA), the second one uses multiway PCA and the last one extracts HI from the significant points related to degradation. A comparison of these methods are…

Full-Wafer Voltage Contrast Inspection for Detection of BEOL Defects

Abstract This paper details an application where E-beam inspection (EBI) can be used for 100% full wafer inspection, generally considered a mythical target for EBI. For process layers where the line-widths and defects of interest are large, very large pixel size and high scan frequency can be used, thereby making full wafer inspection feasible. The metal layers in the back-endof-line fit this …

Fluorocarbon Chemistry: A 0-Dimensional Model for Oxide and Nitride Dry Etching

Abstract In this paper, a 0-dimensional model for the understanding of dry etching characteristics in silicon oxide and nitride materials is reported. The model is applied to analyze the etching performances in a design of experiments where gas mixtures are varied in the fluorocarbon chemistry typical of the “protected sidewall” regime. The modeling analysis of flat sample etching allows f…

The Association Between Combination of Hand Force and Forearm Posture and Inc…

Objective: The objective of this prospective study is to investigate the exposure–response relationships between various workplace physical exposures of force, repetition, and their combination assessed at an individual level with lateral epicondylitis (LE). Background: Workplace upper extremity musculoskeletal disorders (UEMSDs) are prevalent, disabling, and expensive. LE is one of the majo…

Flexible Pressure Sensors Based on Screen-Printed P(VDF-TrFE) and P(VDF-TrFE)…

Abstract This paper presents large-area-printed flexible pressure sensors developed with an all screen-printing technique. The 4 × 4 sensing arrays are obtained by printing polyvinylidene fluoride-trifluoroethylene P(VDF-TrFE) and their nanocomposite with multi-walled carbon nanotubes (MWCNTs) and are sandwiched between printed metal electrodes in a parallel plate structure. The bottom electr…

Efficacy of the Revised NIOSH Lifting Equation to Predict Risk of Low-Back Pa…

Objective: The objective was to evaluate the efficacy of the Revised National Institute for Occupational Safety and Health (NIOSH) lifting equation (RNLE) to predict risk of low-back pain (LBP). Background: In 1993, NIOSH published the RNLE as a risk assessment method for LBP associated with manual lifting. To date, there has been little research evaluating the RNLE as a predictor of the risk…

The NIOSH Lifting Equation and Low-Back Pain, Part 2: Association With Seeki…

Objective: The aim of this study was to investigate the relationship between the revised NIOSH lifting equation (RNLE) and risk of seeking care for low-back pain (SC-LBP). Background: The RNLE is commonly used to quantify low-back physical stressors from lifting/lowering of loads in workplaces. There is no prospective study on relationship between RNLE and SC-LBP. Method: A cohort of 258 inci…

The State of Knowledge of Outdoor Orientation Programs: Current Practices, Re…

Outdoor orientation programs represent a prominent area of experiential education with over 25,000 participants annually. More than 191 outdoor orientation programs currently operate in the United States and Canada. The research examining outdoor orientation programs consists of 25 peer-reviewed published studies and 11 dissertations. A new theory explaining the success of these programs has em…

Comparing the surgical timelines of military and civilians traumatic lower li…

The care and challenges of injured service have been well documented in the literature from a variety of specialities. The aim of this study was to analyse the surgical timelines of military and civilian traumatic amputees and compare the surgical and resuscitative interventions. A retrospective review of patient notes was undertaken. Military patients were identified from the Joint Theatr…

The NIOSH Lifting Equation and Low-Back Pain, Part 1: Association With Low-Ba…

Objective: The aim of this study was to evaluate relationships between the revised NIOSH lifting equation (RNLE) and risk of low-back pain (LBP). Background: The RNLE is commonly used to quantify job physical stressors to the low back from lifting and/or lowering of loads. There is no prospective study on the relationship between RNLE and LBP that includes accounting for relevant covariates.…

Fast Scheduling of Semiconductor Manufacturing Facilities Using Case-Based Re…

Edisi

VOL. 29, NO. 1, FEBRUARY 2016

ISBN/ISSN

0894-6507

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 29, NO. 1, FEBRUARY 2016

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 29, NO. 1, FEBRUARY 2016

No. Panggil

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Fabrication, Characterization, and Simulation of a Low-cost TSV Integration w…

Abstract In this study, a low-cost through-multilayer TSV integration process has been developed. The features are that a double-layer spin coating technique is applied to prevent residual photoresist left inside TSVs. Besides, redistribution layer is deposited before TSV filling in order to eliminate the front-side CMP process, which will lower the fabrication cost. Basic electrical tests of…

Autonomous Student Experiences in Outdoor and Adventure Education

This article explores the current state of knowledge regarding the use of autonomous student experiences (ASE) in outdoor and adventure education (OAE) programs. ASE are defined as components (e.g., solo, final expedition) in which participants have a greater measure of choice and control over the planning, execution, and outcomes of their learning. The article discusses the importance of ASE i…

Enhancement of the Virtual Metrology Performance for Plasma-Assisted Oxide Et…

Abstract Virtual metrology (VM) model based on plasma information (PI) parameter for C4F8 plasma-assisted oxide etching processes is developed to predict and monitor the process results such as an etching rate with improved performance. To apply fault detection and classification or advanced process control models on to the real-mass production lines efficiently, high-performance VM model is …

Effect of Plasma Process for SiO2 Film on Sidewall

Abstract We evaluated the physical and electrical characteristics of SiO2 treated by plasma oxidation on top and sidewall. The plasma process is less effective for SiO2 on sidewall than on top and further less for small pattern. Both the characteristics for SiO2 on sidewall are sensitive to plasma condition in deposition sequence, while not for SiO2 on top. When the plasma process is used as …

GB virus C infection in Indonesian HIV‐positive patients

GB virus C (GBV‐C), a human virus of the Flaviviridae family that is structurally and epidemiologically closest to hepatitis C virus (HCV), has been reported to confer beneficial outcomes in HIV‐positive patients.However, the prevalence of GBV‐C in HIV‐positive individuals in Indonesia is unknown. Since GBV‐C is more prevalent in anti‐HCV positive patients than in anti‐HCV negativ…

High-Volume Processed, ITO-Free Superstrates and Substrates for Roll-to-Roll …

The fabrication of substrates and superstrates prepared by scalable roll-toroll methods is reviewed. The substrates and superstrates that act as the fl exible carrier for the processing of functional organic electronic devices are an essential component, and proposals are made about how the general availability of various forms of these materials is needed to accelerate the development of the f…

Laboratory Safety for Oncogene-Containing Retroviral Vectors

The use of retroviral vectors in research laboratories has been steadily increasing, and with that, questions are arising more frequently regarding the biosafety of these reagents, particularly when the vector delivers a gene with oncogenic properties. Although modern retroviral vector systems produce particles that are replication-defective, there is still a possibility that upon accidental …

A Glyphosate-Resistant Biotype of Annual Bluegrass in Tennessee

Glyphosate is regularly used to control annual bluegrass populations in dormant bermudagrass turf. A population of annual bluegrass not controlled by glyphosate at 840 g ha-1 (glyphosate resistant, GR) was identified on a golf course in Humboldt, TN in 2010. Mature tillers of GR plants were established in a greenhouse and treated with glyphosate at 0, 210, 420, 840, 1,680, 3,360, and 6,720 g ha…

Design of a Decentralized Controller for a Glass RTP System

Abstract The design of a decentralized controller has been studied as an integral part of the development of a commercial rapid thermal processing (RTP) system for manufacturing display glass. The glass RTP system uses bulb-type tungsten-halogen lamps for heating. A highly uniform temperature distribution with a maximum temperature difference of less than 6 ◦C between any two points is requi…

Demand Modeling With Forecast Evolution: An Application to Production Planning

Abstract The value of demand forecast information has been the subject of numerous studies in the inventory literature, but has had limited application in production planning. This paper integrates ideas from forecast evolution and inventory theory to plan work releases into a production facility in the face of stochastic demand. The model, which is solved on a rolling horizon basis, manages …

Data Mining for Significance in Yield-Defect Correlation Analysis

Abstract A yield analysis method using basic yield and in-line defect information in a statistical model to determine root-causes of yield loss in semiconductor manufacturing is presented. The goal of this analysis method is to provide the fab process line management yield loss accounting for defects identified at inspected process layers. Quantifying these losses, in terms of yield loss perce…

Correlational Study Between SiN Etch Rate and Plasma Impedance in Electron Cy…

Abstract The correlation between the change in the etching rate of SiN and the change in the monitored plasma impedance was investigated to estimate the capability of critical dimension (CD) prediction with a plasma impedance monitor (PIM). The results obtained with the PIM were compared with those of optical emission spectroscopy (OES), which was performed using the emission intensity ratio …

Control of Epitaxial Growth of SiGe

Abstract Silicon-Germanium (SiGe), used to boost pFET performance and enhance the properties of high-k metal gate devices, is grown by selective epitaxy on silicon. Since device parameters depend critically on the deposited SiGe thickness, we apply several advanced techniques to control deposition. Feedback and feed-forward of growth rate data is used to control deposition tools. We also appl…

Contact Chains for FinFET Technology Characterization

Abstract Electrical characterization remains a key element in technology development and manufacturing of integrated circuits. Contact chain is a well known part of the diagnostic set of test structures used across many generations of silicon processes. Implementation of such test structures becomes challenging in new technologies with 3-D devices, like FinFET. Contacts to active regions of su…

Carrier Profiling Technology in Ten Nanometers Devices

Abstract The advanced carrier concentration evaluation scheme was proposed with combined higher precise scanning spreading resistance microscopy (SSRM) measurement and technology-CAD (TCAD) analysis in this paper. The cyclic contact (CC) method was applied to variation reduction of SSRM resistance to more accurately characterize for the device. The CC method suppresses dust generation. The va…

Analysis of Temperature Distribution in Stacked IC With On-Chip Sensing Devic…

Abstract Temperature distributions in 3-D integrated circuits (ICs) are analyzed with a test structure, which has a top-tier chip attached on a bottom dummy chip with adhesive layer. The devices with four kinds of top-tier chip thickness tSi of 50–410 μm were fabricated by a standard 0.18 μm CMOS process. The test structure consists of 24 sensor blocks, each of which has sensor p-n diodes…

Analysis and Characterization of Capacitance Variation Using Capacitance Meas…

Abstract To address the need for direct extraction of the capacitance of a chip, a capacitance measurement array (CMA) has been developed. The operation of the CMA is based on the charge-based capacitance measurement (CBCM) technique. The CMA chip consists of 144 CBCM array units (CAU) and each CAU is designed to measure eight individual capacitors. Element selection and precise measurement ar…

Advanced Dicing Technology for Semiconductor Wafer—Stealth Dicing

Abstract “Stealth dicing (SD)” was developed to solve inherent problems of a dicing process such as debris contaminants and unnecessary thermal damages on a work wafer. A completely dry process is another big advantage over other dicing methods. In SD, the laser beam power of transmissible wavelength is absorbed only around focal point in the wafer by utilizing the temperature dependence o…

A Regularized Singular Value Decomposition-Based Approach for Failure Pattern…

Abstract In semiconductor manufacturing processes, monitoring the quality of wafers is one of the most important steps to quickly detect process faults and significantly reduce yield loss. Fail bit maps (FBMs) represent the failed cell count during wafer functional tests and have been popularly used as one of the diagnosis tools in semiconductor manufacturing for process monitoring, root caus…

A Plasticity-Based Model of Material Removal in Chemical–Mechanical Polishi…

Abstract It is well known that the chemical reaction between an oxide layer and a water-based slurry produces a softer hydroxylated interface layer. During chemical–mechanical polishing (CMP), it is assumed that material removal occurs by the plastic deformation of this interface layer. In this paper, the behavior of the hydroxylated layer is modeled as a perfectly plastic material, and a me…

A New Etch Planarization Technology to Correct Non-Uniformity Post Chemical M…

Abstract The introduction of 3-D structures and new materials for advanced logic devices at extremely fine feature size presents challenges for within-wafer and wafer-to-wafer thickness uniformity control that is critical for yield and performance. For conventional chemical mechanical polishing technology, the typical thin film uniformity across the whole wafer may not meet the desired variat…

A New Accelerated Endurance Test for Terabit NAND Flash Memory Using Interfer…

Abstract Limited endurance of E/W cycles is a unique restriction of flash memories and the endurance characteristics usually take a longer time to test. In this paper, we proposed a novel endurance test scheme that takes advantage of the parasitic cell-to-cell interference as well as a shortened program time to accelerate the endurance test for terabit NAND flash memory. The novelty of the ne…

A Discharge-Based Pulse Technique for Probing the Energy Distribution of Posi…

Abstract Characterizing positive charges and its energy distribution in gate dielectric is useful for process qualification. A discharge-based technique is introduced to extract their energy distribution both within and beyond substrate band-gap. This paper investigates the difficulties in its implementation on typical industrial parameter analyzer and provides solutions. For the first time, w…

A Compact Test Structure for Characterizing Transistor Variability Beyond 3σ

Abstract An addressable array test structure is proposed for characterization of transistor variability beyond 3σ away from the mean. The design of the array is based on very compact basic cells which enable a highly efficient layout which has over three times higher normalized device density than similar arrays. Implementations of a 32k array are demonstrated for placement in a standard waf…

Implications of bacterial contaminated seed lots and endophytic colonization …

The economic impact of seedborne bacterial diseases on rice production provides a major motivation for research on seed health. This paper reports on the endophytic growth of a rifampicin-marked strain of the seedborne rice pathogen Pseudomonas fuscovaginae. The bacterium was found in most tested seeds indicating that, even without visible discolouration, seed transmission is possible. Crushed …

Prioritizing Regions to Conserve a Specialist Folivore: Considering Probabili…

Abstract For species that are increasingly threatened by the combined impacts of habitat loss and climate change, the identification of priority regions for conservation planning efforts is urgently required. In the case of specialist folivores, consideration of the effects of climate change on the distributions of their essential food resources should be a key component of conservation planni…

Dna sequencing, anatomy, and calcification patterns support a Monophyletic, s…

For the first time, morpho-anatomical characters that were congruent with DNA sequence data were used to characterize several genera in Hapalidiaceae —the major eco-engineers of Subarctic carbonate ecosystems. DNA sequencing of three genes (SSU, rbcL, ribulose-1, 5-bisphosphate carboxylase/ oxygenase large subunit gene and psbA, photosystem II D1 protein gene), along with patterns of cell …

Planning Across Freshwater and Terrestrial Realms: Cobenefits and Tradeoffs B…

Conservation planning has historically been restricted to planning within single realms (i.e., marine, terrestrial, or freshwater). Recently progress has been made in approaches for cross-realm planning which may enhance the ability to effectively manage processes that sustain biodiversity and ecosystem functions (e.g., connectivity) and thus minimize threats more efficiently. Current advances…

Standardizing immunophenotyping for the Human Immunology Project

The heterogeneity in the healthy human immune system, and the immunological changes that portend various diseases, have been only partially described. Their comprehensive elucidation has been termed the ‘Human Immunology Project’. The accurate measurement of variations in the human immune system requires precise and standardized assays to distinguish true biological changes from technical a…

Routing Algorithms for Network Function Virtualization Enabled Multicast Topo…

Abstract Many multicast services such as live multimedia distribution and real-time event monitoring require multicast mechanisms that involve network functions (e.g., firewall and video transcoding). Network function virtualization (NFV) is a concept that proposes using virtualization to implement network functions on infrastructure building block (such as high volume servers and virtual mac…

Classification of Korean forests: patterns along geographic and environmental…

Abstract Aim: To describe the main vegetation types of the Korean zonal forests and explore their relationship with the main environmental and geographic gradients. Location: Korean Peninsula. Methods: A data set of 3847 releves of zonal (semi)natural forest stands, together with environmental factors recorded in the field or derived from interpolated climatic data was collected. Using the…

Flow-Based Management For Energy Efficient Campus Networks

Abstract Recent studies have shown that the energy consumption of wireless access networks is a threat to the sustainability of mobile cloud services. Consequently, energy efficient solutions are becoming crucial for both local and wireless access networks. In this paper, we propose a flow-based management framework to achieve energy efficiency in campus networks. We address the problem from …

An Effective Web Service Ranking Method via Exploring User Behavior

Abstract Service-oriented computing and Web services are becoming more and more popular, enabling organizations to use the Web as a market for selling their own Web services and consuming existing Web services from others. Nevertheless, with the increasing adoption and presence of Web services, it becomes more difficult to find the most appropriate Web service that satisfies both users’ func…

ATFQ: A Fair and Efficient Packet Scheduling Method in Multi-Resource Environ…

Abstract Large-scale data centers are the key infrastructures for hosting and running a variety of applications. Besides traditional L2/L3 devices, middleboxes are widely deployed in data centers and perform many important functions, e.g., the intrusion detection and firewall. Middleboxes are equipped with multiple kinds of resources, such as CPU and memory. Data flows undergoing different fu…

Design, Modeling, and Simulation of On-Demand Communication Mechanisms for Cy…

Abstract Advanced communication technology is the enabling factor for distributed sensing and control in smart grid. The performance of communication has a significant effect on the performance of the controllers that manage a power system. This effect is more profound when transient level behavior and critical applications are concerned. In these cases, an important issue is to design contro…