Detecting and Correcting Fractions Computation Error Patterns

This article describes a follow-up analysis of findings from a randomized study that tested the efficacy of a blended version of Enhanced Anchored Instruction (EAI) designed to improve both the computation and problem-solving performances of middle school students with disabilities. The goals of the secondary analysis were to track overall error patterns of students in computing with fractions …

Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated …

Abstract—We report on characterization of Si-to-Si contact microswitches fabricated in an ultraclean encapsulation process. This three-terminal microswitch relies on a curved beam (source) that actuates toward the contact terminal (drain) by charging the control terminal (gate). The operation range of this switch from −60 °C to 300 °C is investigated, which approximately yields a resistan…

Interrogation of Droplet Configuration During Electrowetting via Impedance Sp…

Abstract—Several parameters associated with the configuration of a microliter aqueous droplet are determined by the electrical impedance measurements conducted during electrowetting. In each case, the wetted area of a dielectric-coated electrode is first determined from the impedance data, and the known dielectric thickness and permittivity. The wetted area data is then employed in a series …

Implementation of a CMOS-MEMS Filter Through a Mixed Electrical and Mechanica…

Abstract—We propose a novel filter coupling scheme, which combines the merits of mechanically and electrically coupled methods to enable a well-defined narrow bandwidth and a decent stopband rejection in a CMOS-MEMS bandpass filter. In the proposed design, a previously developed free–free beam arrayed resonator is employed as a basic resonant tank for the filter concept validation. By the …

Impact of Chip-Edge Structures on Alignment Accuracies of Self-Assembled Dies…

Abstract—The self-assembly of known good dies on hosting substrates using liquid surface tension is a promising technology to create highly integrated 3-D and heterogeneous microelectronic systems. In this paper, we investigate the effects of the edge structures of self-assembled chips on alignment accuracies. Nine types of 100-μm-thick Si chips (3 mm × 3 mm) with and without step geometrie…

High-Q UHF Spoke-Supported Ring Resonators

Abstract—A vibrating micromechanical spoke-supported ring resonator employing a central peg-anchor, balanced non-intrusive quarter-wavelength extensional support beams, and notched support attachments attains high Q-factor in vacuum, posting 10 000 at 441 MHz when made of polysilicon structural material and 42 900 at 2.97 GHz when made of microcrystalline diamond. The latter marks the highes…

Highly Sensitive Tactile Sensing Array Realized Using a Novel Fabrication Pro…

Abstract—This paper presents a highly sensitive tactile sensing array. Sensing elements of the array comprise multiwall carbon nanotubes and polydimethylsiloxane polymer. A novel lithography process is proposed for fabricating an SU-8 mold for shaping the sensing cells in the array. In addition, a nylon membrane filter is proposed to serve as a mold for numerous microdome patterns, which wer…

Highly Efficient Passive Thermal Micro-Actuator

Abstract—A passive thermal micro-actuator with large area specific work and large displacement, fabricated of electroplated nickel on a silicon substrate is presented. The actuation relies on the thermal expansion of beams in a V-shaped geometry. Two V-shaped beam stacks are aligned opposite to each other and are coupled to a lever transmission. The actuator exhibits low energy losses due to …

Ge/ZnS-Based Micromachined Fabry–Perot Filters for Optical MEMS in the Long…

Abstract—This paper reports on the successful demonstration of Ge/ZnS-based Fabry–Perot filters operating in the longwave infrared (LWIR). The suitability of thermally deposited Ge and ZnS as thin-film mirror materials for micromachined LWIR Fabry–Perot filters has been fully investigated, and it is shown that a film growth temperature higher than 150 °C is key to depositing durable ZnS …

Bodily Attractiveness and Egalitarianism are Negatively Related in Males

Ancestrally, relatively attractive individuals and relatively formidable males may have had reduced incentives to be egalitarian (i.e., to act in accordance with norms promoting social equality). If selection calibrated one’s egalitarianism to one’s attractiveness/formidability, then such people may exhibit reduced egalitarianism (“observed egalitarianism”) and be perceived by others a…

Cool Guys and Warm Husbands: The Effect of Smiling on Male Facial Attractiven…

While smiling enhances women’s facial attractiveness, the findings are inconclusive for men. The present study investigated the effect of smiling on male facial attractiveness for short- and long-term prospective partners using East Asian and European samples. In Experiment 1 (N ¼ 218), where female participants rated male facial attractiveness, the facilitative effect of smiling was present…

Frictional Characteristics of Sub-100-μm Borosilicate Glass Balls for Actuat…

Abstract—The frictional characteristics of ∼62-μm diameter borosilicate glass balls used as rolling elements for a miniature electromagnetic linear actuator were assessed. The glass balls were placed between two silicon plates of the actuator with linear bearing tracks fabricated in the shape of V-grooves on the silicon surface. Rolling friction experiments were conducted using the electro…

Flexible Distributed Pressure Sensing Strip for a Urethral Catheter

Abstract—A multi-sensor flexible strip is developed for a urethral catheter to measure distributed pressure in a human urethra. The developed sensor strip has important clinical applications in urodynamic testing for analyzing the causes of urinary incontinence in patients. There are two major challenges in the development of the sensor. First, a highly sensitive sensor strip that is flexibl…

Fabrication and Nonlinear Thermomechanical Analysis of SU8 Thermal Actuator

Abstract—SU8-based micromechanical structures are widely used as thermal actuators in the development of compliant micromanipulation tools. This paper reports the design, nonlinear thermomechanical analysis, fabrication, and thermal actuation of SU8 actuators. The thermomechanical analysis of the actuator incorporates nonlinear temperature-dependent properties of SU8 polymer to accurately mod…

Experimental Study of Numerical Optimization for 3-D Microstructuring Using D…

Abstract—Digital micromirror device (DMD)-based grayscale lithography is a promising tool for 3-D photolithography of thick photoresists, because this technique provides a patterning solution for free-form 3-D microstructures. Among the numerous process parameters in DMD-based grayscale lithography, the exposure dose pattern corresponding to the grayscale mask pattern, the focal position in t…

Development of Novel Implantable Intraocular Pressure Sensors to Enhance the …

Abstract—In this paper, we proposed a dual-mode intraocular pressure (IOP) sensor that has two separated diaphragms to conduct the changes of inductance and capacitance, and we compared the sensor’s performance with that of the conventional single variable capacitive sensor (single-mode sensor). Both mode sensors were used to monitor the pressure in in vitro tests with multiple media and in…

Development of a Built-In Micro-Laser Doppler Velocimeter

Abstract—Our research group previously developed an integrated micro-laser Doppler velocimeter only 2.8 × 2.8 mm in area and 1-mm thick by minimizing a number of components with multifunctional parts, such as a glass cover with lenses for hermetic sealing and laser collimation, a silicon base for casing, a mirror mount, a laser diode bench, and others. In this paper, by applying a fast Fouri…

Design Rules for Temperature Compensated Degenerately n-Type-Doped Silicon ME…

Abstract—The first- and second-order temperature coefficients and the total temperature-induced frequency deviation of degenerately n-type-doped silicon resonators are modeled. Modeling is based on finite element modelling-based sensitivity analysis of various resonator geometries combined with the experimental results on doping-dependent elastic constants of n-type-doped silicon. The analysi…

Design and Implementation of a Tunable, Duffing-Like Electronic Resonator via…

Abstract—To date, many vibration-based sensing modalities have relied upon monitoring small shifts in the natural frequency of a system to detect structural changes (e.g., in mass or stiffness), which are attributable to the chemical or biological species, or other phenomena, that are being measured. Often, this approach carries significant signal processing expense due to the presence of el…

Design and Analysis of Scanning Probe Microscopy Cantilevers With Microtherma…

Abstract—The scanning probe microscope has revolutionized our ability to image and characterize the physical and chemical properties of material with atomic resolution. It has evolved as a versatile instrument for nanofabrication including atomic deposition, nanolithography, nanomachining, atomic manipulation, and assembly. However, in order to enable practical nanofabrication with scanning …

Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within …

Abstract—In this paper, we present the fabrication and test results of an oxide-coated polysilicon disk resonator gyroscope in a wafer-scale encapsulation process. We demonstrate the effects of an oxide coating on the device structure and the key performance parameters of resonant-based sensors, such as the temperature coefficient of frequency and quality factor (Q). Results from the as-fabr…

Characterization of MEMS Resonator Nonlinearities Using the Ringdown Response

Abstract—We present a technique for estimation of the model parameters for a single-mode vibration of symmetric micromechanical resonators, including the coefficients of conservative and dissipative nonlinearities. The nonlinearities result in an amplitude-dependent frequency and a nonexponential decay, which are characterized from the ringdown response. An analysis of the amplitude of the ri…

Characterization and Modeling of Nonlinearities in In-Plane Gap Closing Elect…

Abstract—This paper investigates in detail a micro scale in-plane gap closing electrostatic energy harvester with strong nonlinearities in squeeze-film damping, electromechanical coupling, and impacts on end-stops. The device shows softening response on increasing the bias voltage and saturation behavior on impact with end-stops at high enough acceleration amplitude. We demonstrate that a lu…

Bulk Mode Disk Resonator With Transverse Piezoelectric Actuation and Electros…

Abstract—This paper presents a wine-glass bulk mode disk resonator based on a novel transverse piezoelectric actuation technique to achieve bulk mode resonance of the single crystalline silicon disk structure. The device is fabricated in a commercial microelectromechnical systems (MEMS) process, and combines reasonable quality factor and superior motional resistance in a low-cost technology.…

Bimorph Piezoelectric Micromachined Ultrasonic Transducers

Abstract—This paper presents the concept, basic theory, fabrication, and testing results of dual-electrode bimorph piezoelectric micromachined ultrasonic transducers (pMUTs) for both air- and liquid-coupled applications. Both the theoretical analyses and experimental verifications under the proposed differential drive scheme display high drive sensitivity and an electromechanical coupling ene…

Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using S…

Abstract—This paper reports a novel infrared focal plane array (FPA) using SiNx/SiO2/SiNx sandwiched structure as the supporting frames for bimaterial cantilever pixels. The device was fabricated by a bulk silicon process, where a trench backfill technique was employed to form the SiNx/SiO2/SiNx sandwiched frames. By replacing the silicon frame with SiNx/SiO2/SiNx sandwiched frame, the fill f…

An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupl…

Abstract—This paper reports an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on the proof masses, differential electrostatic stiffness perturbations will be applied to the WCRs, leading to mode localization, and thus, mode shape changes. Therefore, acceleration can be sensed by measuring the amplitud…

Approaching Roll-to-Roll Fluidic Self-Assembly: Relevant Parameters, Machine …

Abstract—This paper presents the implementation of an automated roll-to-roll fluidic self-assembly system based on the surface tension driven self-assembly with applications in the field of macroelectronics. The reported system incorporates automated agitation, web motion, component dispensing, and recycling. The process enables the assembly and electrical connection of semiconductor dies/chi…

Aluminum Nitride Cross-Sectional Lamé Mode Resonators

Abstract—This paper demonstrates a new class of AlN-based piezoelectric resonators for operation in the microwave frequency range. These novel devices are identified as cross-sectional-Lamémode resonators (CLMRs) as they rely on the piezoelectric transduction of a Lamé mode, in the cross section of an AlN plate. Such a 2-D mechanical mode of vibration, characterized by motion along both the…

A Tri-Beam Dog-Bone Resonant Sensor With High-Q in Liquid for Disposable Test…

Abstract—This paper presents a novel tri-beam structured dog-bone resonance-mode micro-sensor, with a frequency readout piezoresistive Wheatstone-bridge independently located at the central beam for the detection of liquid-phase bio/chemical analyte. Compared with the conventional dual-beam dog-bone resonator, the tri-beam resonator has advantages in the elimination of signal feed-through an…

A Three Degree-of-Freedom Weakly Coupled Resonator Sensor With Enhanced Stiff…

Abstract—This paper reports a three degree-offreedom (3DoF) microelectromechanical systems (MEMS) resonant sensing device consisting of three weakly coupled resonators with enhanced sensitivity to stiffness change. If one resonator of the system is perturbed by an external stimulus, mode localization occurs, which can be detected by a change of modal amplitude ratio. The perturbation can be,…

A Swallowable Smart Pill for Local Drug Delivery

Abstract—In this paper, a smart pill for local drug delivery is presented. The pill is designed to achieve local therapy on gastrointestinal tissue thanks to a novel drug delivery system (DDS). The DDS consists of a miniature electrolytic pump. This microfabricated pump is ideal for medical applications because of its low power consumption, compatibility with small size batteries, integrabili…

A Sub-400-nT/√Hz, 775-μW, Multi-Loop MEMS Magnetometer With Integrated Rea…

Abstract—This paper presents a novel z-axis Lorentz force magnetometer coupled with a low-power readout integrated circuit. The sensor is fabricated using an industrial process, and exploits an Al-on-polysilicon multi-loop architecture that gives a five-fold sensitivity and resolution improvement, useful for off-resonance operation. The integrated readout is based on a differential charge amp…

A New Temperature-Tolerant RF MEMS Switch Structure Design and Fabrication fo…

Abstract—In this paper, the design and fabrication of a new radio frequency (RF) microelectromechanical system (MEMS) switch structure is presented. This RF MEMS switch is developed to get the minimum permanent deformation on the microbridge after 200 °C thermal treatment. The residual stress-based buckling on the MEMS bridge is simulated for 5–40-MPa/μm stress gradient (σ) with 5-MPa/…

A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Abstract—In this paper, we design, fabricate, and validate a large-stroke 3-degree-of-freedom (DOF) positioning stage with integrated displacement sensors for feedback control in a single-mask microelectromechanical systems (MEMS) fabrication process. Three equal shuttles exactly define the position of the stage in x, y, and Rz. The kinematic relation between the shuttle positions and the sta…

A Highly Reliable MEMS Relay With Two-Step Spring System and Heat Sink Insula…

Abstract—This paper reports a highly reliable electrostatic microelectromechanical systems (MEMS) relay for high-power switching applications. The main proposal to elevate reliability is to reduce thermal damage in the contact area. Since a contact resistance is the key parameter determining the amount of Joule-heating and the corresponding thermal damage, we devised a unique spring structur…

A Fully Integrated Oven Controlled Microelectromechanical Oscillator—Part I…

Abstract—This paper, the first of two parts, reports the design and fabrication of a fully integrated oven controlled microelectromechanical oscillator (OCMO). This paper begins by describing the limits on oscillator frequency stability imposed by the thermal drift and electronic properties (Q, resistance) of both the resonant tank circuit and feedback electronics required to form an electro…

Methodologically Sound: Evaluating the Psychometric Approach to the Assessmen…

Copping, Campbell, and Muncer (2014) have recently published an article critical of the psychometric approach to the assessment of life history (LH) strategy. Their purported goal was testing for the convergent validation and examining the psychometric structure of the High-K Strategy Scale (HKSS). As much of the literature on the psychometrics of human LH during the past decade or so has emana…

The Effects of Being in a “New Relationship” on Levels of Testosterone in…

In light of previous research showing that different types of relationships affect levels of testosterone in men, this study examined whether categorizing relationship types according to relationship length can shed further light on variations in levels of testosterone. Salivary testosterone samples were obtained from a sample of men and details about their relationship status, sociosexual orie…

Sources of Marital Conflict in Five Cultures

This analysis of previously collected data examined four fitness-relevant issues for their possible role in marital conflict. These were sex, finances, division of labor, and raising children, selected in light of their pertinence to sex differences in reproductive strategies. Over 2,000 couples in five diverse cultures were studied. Marital conflict was assessed by the Problems with Partner sc…

A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an E…

Abstract—This paper reports a compact Fourier transform spectrometer system with a large-stroke electrothermal microelectromechanical systems (MEMS) mirror and other optical components all integrated on a micromachined silicon optical bench with the footprint of 2 cm × 2 cm. The linear optical path difference (OPD) scan range generated by the MEMS mirror reaches up to 450 μm, and the tiltin…

3-D Non-UV Digital Printing of Hydrogel Microstructures by Optically Controll…

Abstract—A technique using digital masks without ultraviolet light to rapidly print 3-D biopolymer structures with complex microarchitectures in a microfluidic chip has been demonstrated. In this approach, a customized system is used to project light images on a photoconductive substrate in order to create localized virtual electrodes when an alternating electric field is applied across the f…

2-D Electrostatic Actuation of Microshutter Arrays

Abstract—Electrostatically actuated microshutter arrays consisting of rotational microshutters (shutters that rotate about a torsion bar) were designed and fabricated through the use of models and experiments. Design iterations focused on minimizing the torsional stiffness of the microshutters while maintaining their structural integrity. Mechanical and electromechanical test systems were con…

Yield Prediction Through the Event Sequence Analysis of the Die Attach Process

Abstract—Die attach is the process of mounting a plurality of dice to a printed circuit board (PCB) or substrate. Die attach is critical to the thermal and electrical performance of semiconductor products, significantly affecting the final yield of PCBs. In general, the die attacher records alarm events, change events, and maintenance events in a log. Alarm events occur when dice are not alig…

Wafer Surface Charging Model for Single-Wafer Wet-Spin Processes

Abstract—Wet chemical processes in integrated circuit (IC) manufacturing are used in many applications, e.g., post-etch residue removal and pre-deposition surface treatment. While advanced single-wafer wet spin tools are part of the critical toolset for advanced IC fabrication, non-optimized tool hardware and/or process may induce different types of wafer surface charging issues. In this pap…

Using Wafer Map Features to Better Predict Die-Level Failures in Final Test

Abstract—In semiconductor manufacturing, wafer fabrication is followed by chip assembly where individual dies are assembled as a packaged chip. In between, dies are tested in terms of their electrical properties and those which fail to pass the “wafer test” are filtered out. However, some faulty dies pass the test and cause a packaged chip to fail in the final test. The inaccuracy of the …

Uniformity Control of 3-D Stacked ICs: Optical Metrology and Statistical Anal…

Abstract—This paper evaluates various optical metrology techniques for in-line control of the niformity of 3-D stacked structures. Key process steps during 3-D integration flow were identified and characterized in order to quantify their specific intra-wafer dispersion signature. The cross correlation between the various intra-wafer process step signatures was then analyzed to verify the data…

Tutorial on Applying the VM Technology for TFT-LCD Manufacturing

Abstract—In the high-tech industries, on-line quality monitoring on each workpiece under processing is required to ensure process stability and improve yield rate. However, conducting workpiece-by-workpiece actual metrology is very expensive and time-consuming. In this case, a novel idea is to use “virtual metrology” (VM) that conjectures workpiece quality based on process data collected…

Tristate Inverter Array: A New Technology Development Yield Learning Vehicle …

Edisi

VOL. 28, NO. 4, NOVEMBER 2015

ISBN/ISSN

0894-6507

Deskripsi Fisik

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 4, NOVEMBER 2015

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 4, NOVEMBER 2015

No. Panggil

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Thermal Stress Effects on the Electrical Properties of p-Channel Polycrystall…

Abstract—We developed a method to compact the glass sheets of a flat-panel displays that use metal-induced laterally crystallized (MILC) polycrystalline-silicon (poly-Si) thin-film transistors (TFTs), and the effects of thermal stress on the fabricated devices were compared against those of a bare-glass device. The glass substrate was exposed to a temperature of 650 ◦C for 40 h in order to …