Ditapis dengan
MEMS-Based Tunable Fabry–Perot Filters for Adaptive Multispectral Thermal I…
Abstract—This paper reports on a proof-of-concept microelectromechanical system-based Fabry–Perot filter that is capable of electrically tuning within the long-wave infrared thermal imaging band of 8–12 μm. The device employs a single-layer quarter-wavelength thick tensile germanium membrane for the suspended top mirror in order to achieve nanometer-scale as-released mirror flatness acr…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
- -
MEMS Scale PVDF-TrFE-Based Piezoelectric Energy Harvesters
Abstract—This paper presents the design, the fabrication, and the performance characterization of microelectromechanical systems (MEMS) scale cantilever-type piezoelectric energy harvesters (PEHs) that utilize the piezoelectric polymer polyvinylidene fluoride–trifluoroethylene (PVDF-TrFE). Ranges are determined for device dimensions according to the calculations based on mathematical model…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic D…
Abstract—The design and characterization of a twodegree-of-freedom serial kinematic microelectro mechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM) is reported. A novel design is introduced to achieve a serial kinematic mechanism based on a standard siliconon-insulator MEMS fabrication process. The nanopositioner comprises a slow axis with a resonance frequency…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Mechanical Interfacing Using Suspended Ultrathin Films From ALD
Abstract—Interlocking microstructures formed from suspended ultrathin films create a mechanical bond between heterogeneous microfabricated dies. Films approximately 34 nm in thickness have been fabricated using atomic layer deposition in conjunction with standard surface micromachining. Bonding surfaces consist of polyimide pillars with a pitch of 19.8–29 μm that support nanofilm cantileve…
- Edisi
- -
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
- -
Material Characterization and Transfer of Large-Area Ultra-Thin Polydimethyls…
Abstract—Fabrication of ultra-thin (1–20-μm thickness) polydimethylsiloxane (PDMS) films is enabled with a hexane dilution process and an underlying gelatin release layer. The release and transfer of these films over large areas (>5 cm) allows measurement of the thickness-dependent and process-dependent mechanical properties of ultra-thin PDMS membranes, reported for the first time. The e…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Magnetoviscoelastic Ferrofluid-Based Magnetometer
Abstract—In this paper, we present a novel concept for magnetic sensing that is based upon the sensitive monitoring of the magnetoviscoelastic effects in magnetic nanoparticle containing ferrofluids using micromachined shear mode bulk acoustic wave quartz crystal resonators (μQCR). The unique sensor concept is based on the application of, hitherto unexplored, magnetic field induced viscoela…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
- -
Low-Temperature Wafer Bonding Using Solid–Liquid Inter-Diffusion Mechanism
Abstract—The low temperature joining of semiconductor substrates on wafer level by solid–liquid inter-diffusion bonding using the Cu/Ga and Au/In systems is investigated regarding the bonding parameters and their influence on bond interface properties. The focus is on temperature dependence and composition of interface. In the case of Cu/Ga bonding, a phase transition from CuGa2 to Cu9Ga4 …
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Lead-Free (K,Na)NbO3 Impact-Induced-Oscillation Microenergy Harvester
Abstract—We developed microenergy harvesters using impact-induced oscillation to scavenge electrical power from low frequency (
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Large-Area MEMS-Based Distributed Bragg Reflectors for Short-Wave and Mid-Wav…
Abstract—We present the design, fabrication, and optical characterization of silicon-air-silicon-based distributed Bragg reflectors, or quarter wavelength mirrors, in sizes ranging from 200 μm × 200 μm to 5 mm × 5 mm. Such mirrors can be used in conjunction with either single-element photodetectors or large-area focal plane arrays to realize tunable multispectral sensors or adaptive foca…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Compression-Stage-Based Differential Displacement Sensing Device
Abstract—A differential structure based on a compression stage, which has negative displacement coefficient unit (NDCU) and positive displacement coefficient unit (PDCU), is designed to improve the sensitivity of the displacement measurement. The sensing material in the compression-stage-based differential displacement sensing device is made of conductive polymer composite, which has a critic…
- Edisi
- -
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
- -
Capillary Flow in PDMS Cylindrical Microfluidic Channel Using 3-D Printed Mold
Abstract—This letter investigates the capillary filling in polydimethylsiloxane (PDMS) microchannels using 3-D printed molds to produce channels with circular cross sections. The circular cross sections are prevalent in biology and anatomy, yet they cannot readily be mimicked with existing soft-lithography techniques. The molds are printed directly from computer-aided design files, making rap…
- Edisi
- -
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
- -
Investigation of E-Beam Evaporated Silicon Film Properties for MEMS Applications
Abstract—This paper investigates the crystallinity, microstructure, surface morphology, stress characteristics, and Young’s Modulus of ultrahigh vacuum (UHV) electron-beam (E-beam) evaporated silicon films with a low thermal budget. The films are evaporated at various substrate temperatures ranging from 200 °C–625 °C, deposition rates ranging from 50 to 400 nm/min, and annealed at 600 …
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated …
Abstract—We report on characterization of Si-to-Si contact microswitches fabricated in an ultraclean encapsulation process. This three-terminal microswitch relies on a curved beam (source) that actuates toward the contact terminal (drain) by charging the control terminal (gate). The operation range of this switch from −60 °C to 300 °C is investigated, which approximately yields a resistan…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Investigation Into the Quality Factor of Piezoelectric-on-Silica Micromachine…
Abstract—In this paper, we investigate loss mechanisms in piezoelectric-on-silica bulk acoustic wave resonators, including those resulting from thermoelastic damping (TED), surface roughness, and supporting tethers. Alternate resonator designs, piezoelectric materials, and fabrication processes are demonstrated to empirically test these loss mechanisms. Quality factors (Qs) in the order of �…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Interrogation of Droplet Configuration During Electrowetting via Impedance Sp…
Abstract—Several parameters associated with the configuration of a microliter aqueous droplet are determined by the electrical impedance measurements conducted during electrowetting. In each case, the wetted area of a dielectric-coated electrode is first determined from the impedance data, and the known dielectric thickness and permittivity. The wetted area data is then employed in a series …
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Integratable Capacitive Sensor for Identification of Microfluidic Two-Phase F…
Abstract—This paper presents a feasible solution for a real-time sensing of microfluidic two-phase flow in lab-on-chip devices. A capacitive flow pattern sensor has been realized by employing an interdigital electrode configuration and a thin dielectric film. Three main flow patterns were observed in the microchannel, namely, droplet, short slug, and long slug flows. The output signal from th…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
- -
In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection
Abstract—This paper presents a new design and a complete characterization of amplitude-modulation gyroscopes based on piezoresistive nanogauges. The working principle and optimization criteria of in-plane and out-of-plane devices relying on double frame decoupling and levered sense mode are discussed in light of sensitivity and resolution theoretical predictions. The architecture of driving …
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
In Situ Platform for Isothermal Testing of Thin-Film Mechanical Properties Us…
Abstract—An in situ tensile test platform has been developed to study the mechanical properties of thin-film metal specimens. The fully integrated on-chip platform loads a specimen using a thermal actuator (TA). TAs conveniently provide high forces and excellent alignment, but generate large heat that can flow to specimens and raise their temperature. In the new design, heat flow to the speci…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Improving Sensitivity of Resonant Sensor Systems Through Strong Mechanical Co…
Abstract—This paper reports on the first use of strongly coupled microresonators to improve the sensitivity of resonant sensing systems. To date, the research on coupled resonant sensors has concentrated on weakly coupled systems, which rely on the measurement of signal amplitudes. Strongly coupled resonant sensor systems, on the other hand, provide a frequencyshift output that results in imp…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
- -
Implementation of a CMOS-MEMS Filter Through a Mixed Electrical and Mechanica…
Abstract—We propose a novel filter coupling scheme, which combines the merits of mechanically and electrically coupled methods to enable a well-defined narrow bandwidth and a decent stopband rejection in a CMOS-MEMS bandpass filter. In the proposed design, a previously developed free–free beam arrayed resonator is employed as a basic resonant tank for the filter concept validation. By the …
- Edisi
- -
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
- -
Impact of Chip-Edge Structures on Alignment Accuracies of Self-Assembled Dies…
Abstract—The self-assembly of known good dies on hosting substrates using liquid surface tension is a promising technology to create highly integrated 3-D and heterogeneous microelectronic systems. In this paper, we investigate the effects of the edge structures of self-assembled chips on alignment accuracies. Nine types of 100-μm-thick Si chips (3 mm × 3 mm) with and without step geometrie…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
- -
High-Q UHF Spoke-Supported Ring Resonators
Abstract—A vibrating micromechanical spoke-supported ring resonator employing a central peg-anchor, balanced non-intrusive quarter-wavelength extensional support beams, and notched support attachments attains high Q-factor in vacuum, posting 10 000 at 441 MHz when made of polysilicon structural material and 42 900 at 2.97 GHz when made of microcrystalline diamond. The latter marks the highes…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
- -
Highly Sensitive Tactile Sensing Array Realized Using a Novel Fabrication Pro…
Abstract—This paper presents a highly sensitive tactile sensing array. Sensing elements of the array comprise multiwall carbon nanotubes and polydimethylsiloxane polymer. A novel lithography process is proposed for fabricating an SU-8 mold for shaping the sensing cells in the array. In addition, a nylon membrane filter is proposed to serve as a mold for numerous microdome patterns, which wer…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Highly Efficient Passive Thermal Micro-Actuator
Abstract—A passive thermal micro-actuator with large area specific work and large displacement, fabricated of electroplated nickel on a silicon substrate is presented. The actuation relies on the thermal expansion of beams in a V-shaped geometry. Two V-shaped beam stacks are aligned opposite to each other and are coupled to a lever transmission. The actuator exhibits low energy losses due to …
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Ge/ZnS-Based Micromachined Fabry–Perot Filters for Optical MEMS in the Long…
Abstract—This paper reports on the successful demonstration of Ge/ZnS-based Fabry–Perot filters operating in the longwave infrared (LWIR). The suitability of thermally deposited Ge and ZnS as thin-film mirror materials for micromachined LWIR Fabry–Perot filters has been fully investigated, and it is shown that a film growth temperature higher than 150 °C is key to depositing durable ZnS …
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Frictional Characteristics of Sub-100-μm Borosilicate Glass Balls for Actuat…
Abstract—The frictional characteristics of ∼62-μm diameter borosilicate glass balls used as rolling elements for a miniature electromagnetic linear actuator were assessed. The glass balls were placed between two silicon plates of the actuator with linear bearing tracks fabricated in the shape of V-grooves on the silicon surface. Rolling friction experiments were conducted using the electro…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Flexible Distributed Pressure Sensing Strip for a Urethral Catheter
Abstract—A multi-sensor flexible strip is developed for a urethral catheter to measure distributed pressure in a human urethra. The developed sensor strip has important clinical applications in urodynamic testing for analyzing the causes of urinary incontinence in patients. There are two major challenges in the development of the sensor. First, a highly sensitive sensor strip that is flexibl…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Fabrication of Lead-Free Piezoelectric (K, Na)NbO3 Thin Film on Nickel-Based …
Abstract—It is desirable to replace noble metals used aselectrode materials for piezoelectric thin film with base metals. A nickel-based layer is proposed as a bottom electrode for potassium (K) sodium (Na) niobate (NbO3) (KNN) piezoelectric thin film. Pure nickel is used as a bottom electrode under the KNN layer, and nickel silicide is used as an uncovered bottom electrode to gain access to…
- Edisi
- -
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
- -
Fabrication and Nonlinear Thermomechanical Analysis of SU8 Thermal Actuator
Abstract—SU8-based micromechanical structures are widely used as thermal actuators in the development of compliant micromanipulation tools. This paper reports the design, nonlinear thermomechanical analysis, fabrication, and thermal actuation of SU8 actuators. The thermomechanical analysis of the actuator incorporates nonlinear temperature-dependent properties of SU8 polymer to accurately mod…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
- -
Experimental Study on Etching Characteristics of a Spin-Etching Method
Abstract—In this paper, a spin-etching method is proposed for wafer thinning using a mixture of hydrofluoric, nitric, and acetic acids (HNA solution), and experimental studies are conducted. In the spin-etching apparatus, the silicon wafer was rotated in a Teflon bath filled with HNA solution. The etch rate of HNA spin-etching can be determined by mixture ratio; mass transfer, both through an…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Experimental Study of Numerical Optimization for 3-D Microstructuring Using D…
Abstract—Digital micromirror device (DMD)-based grayscale lithography is a promising tool for 3-D photolithography of thick photoresists, because this technique provides a patterning solution for free-form 3-D microstructures. Among the numerous process parameters in DMD-based grayscale lithography, the exposure dose pattern corresponding to the grayscale mask pattern, the focal position in t…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Enhancing Mechanical Quality Factors of Micro-Toroidal Optomechanical Resonat…
Abstract—Fabrication of efficient optomechanical resonators with high mechanical Q-factors without degrading their optical Q-factors or reducing effective mass is challenging. One of the limiting sources of mechanical loss for silica micro-toroids is the clamping loss. Previous efforts on reducing this loss were focused on reducing the connectivity between the toroid and the pillar, which res…
- Edisi
- -
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
- -
Experimental Analysis of Vapor HF Etch Rate and Its Wafer Level Uniformity on…
Abstract—This paper presents the characterization results of the release step with vapor hydrofluoric acid on a Complementary Metal Oxide Semiconductor-Microelectromechanical Systems (CMOS-MEMS) process obtained with a new methodology for controlling the release etch process of CMOS-MEMS devices. The effect of release hole size on etch rate and uniformity was investigated. No appreciable eff…
- Edisi
- -
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
- -
Dynamically Balanced Folded-Beam Suspensions for Resonators
Abstract—The standard folded-beam suspension is often used in electrostatic comb-drive resonators with the intention of achieving a system with a linear response. However, we show that the harmonic response of the standard folded-beam suspension is not linear at the fundamental resonance frequency of the system. Specifically, we show that at the fundamental resonance frequency, the stiffness…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Development of Novel Implantable Intraocular Pressure Sensors to Enhance the …
Abstract—In this paper, we proposed a dual-mode intraocular pressure (IOP) sensor that has two separated diaphragms to conduct the changes of inductance and capacitance, and we compared the sensor’s performance with that of the conventional single variable capacitive sensor (single-mode sensor). Both mode sensors were used to monitor the pressure in in vitro tests with multiple media and in…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Development of a Built-In Micro-Laser Doppler Velocimeter
Abstract—Our research group previously developed an integrated micro-laser Doppler velocimeter only 2.8 × 2.8 mm in area and 1-mm thick by minimizing a number of components with multifunctional parts, such as a glass cover with lenses for hermetic sealing and laser collimation, a silicon base for casing, a mirror mount, a laser diode bench, and others. In this paper, by applying a fast Fouri…
- Edisi
- -
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
- -
Design Rules for Temperature Compensated Degenerately n-Type-Doped Silicon ME…
Abstract—The first- and second-order temperature coefficients and the total temperature-induced frequency deviation of degenerately n-type-doped silicon resonators are modeled. Modeling is based on finite element modelling-based sensitivity analysis of various resonator geometries combined with the experimental results on doping-dependent elastic constants of n-type-doped silicon. The analysi…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Design and Implementation of a Tunable, Duffing-Like Electronic Resonator via…
Abstract—To date, many vibration-based sensing modalities have relied upon monitoring small shifts in the natural frequency of a system to detect structural changes (e.g., in mass or stiffness), which are attributable to the chemical or biological species, or other phenomena, that are being measured. Often, this approach carries significant signal processing expense due to the presence of el…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
- -
Design and Analysis of Scanning Probe Microscopy Cantilevers With Microtherma…
Abstract—The scanning probe microscope has revolutionized our ability to image and characterize the physical and chemical properties of material with atomic resolution. It has evolved as a versatile instrument for nanofabrication including atomic deposition, nanolithography, nanomachining, atomic manipulation, and assembly. However, in order to enable practical nanofabrication with scanning …
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Constant Velocity High Force Microactuator for Stick-Slip Testing of Micromac…
Abstract—A chevron thermal actuator has been implemented as a constant velocity puller in a multiasperity frictional test platform. This platform enables a wide variation of puller velocity (1–3100 μm/s, 3.5 decades), normal load (2–4500 μN, 3.4 decades), and spring constant (0.06–100 μN/μm, 3.2 decades). These characteristics are achieved by leveraging the actuator thermal time con…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within …
Abstract—In this paper, we present the fabrication and test results of an oxide-coated polysilicon disk resonator gyroscope in a wafer-scale encapsulation process. We demonstrate the effects of an oxide coating on the device structure and the key performance parameters of resonant-based sensors, such as the temperature coefficient of frequency and quality factor (Q). Results from the as-fabr…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
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Characterization of MEMS Resonator Nonlinearities Using the Ringdown Response
Abstract—We present a technique for estimation of the model parameters for a single-mode vibration of symmetric micromechanical resonators, including the coefficients of conservative and dissipative nonlinearities. The nonlinearities result in an amplitude-dependent frequency and a nonexponential decay, which are characterized from the ringdown response. An analysis of the amplitude of the ri…
- Edisi
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- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
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- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
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Characterization and Modeling of Nonlinearities in In-Plane Gap Closing Elect…
Abstract—This paper investigates in detail a micro scale in-plane gap closing electrostatic energy harvester with strong nonlinearities in squeeze-film damping, electromechanical coupling, and impacts on end-stops. The device shows softening response on increasing the bias voltage and saturation behavior on impact with end-stops at high enough acceleration amplitude. We demonstrate that a lu…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
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- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
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Bulk Mode Disk Resonator With Transverse Piezoelectric Actuation and Electros…
Abstract—This paper presents a wine-glass bulk mode disk resonator based on a novel transverse piezoelectric actuation technique to achieve bulk mode resonance of the single crystalline silicon disk structure. The device is fabricated in a commercial microelectromechnical systems (MEMS) process, and combines reasonable quality factor and superior motional resistance in a low-cost technology.…
- Edisi
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- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
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- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
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Bimorph Piezoelectric Micromachined Ultrasonic Transducers
Abstract—This paper presents the concept, basic theory, fabrication, and testing results of dual-electrode bimorph piezoelectric micromachined ultrasonic transducers (pMUTs) for both air- and liquid-coupled applications. Both the theoretical analyses and experimental verifications under the proposed differential drive scheme display high drive sensitivity and an electromechanical coupling ene…
- Edisi
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- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
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Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using S…
Abstract—This paper reports a novel infrared focal plane array (FPA) using SiNx/SiO2/SiNx sandwiched structure as the supporting frames for bimaterial cantilever pixels. The device was fabricated by a bulk silicon process, where a trench backfill technique was employed to form the SiNx/SiO2/SiNx sandwiched frames. By replacing the silicon frame with SiNx/SiO2/SiNx sandwiched frame, the fill f…
- Edisi
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- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
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An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupl…
Abstract—This paper reports an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on the proof masses, differential electrostatic stiffness perturbations will be applied to the WCRs, leading to mode localization, and thus, mode shape changes. Therefore, acceleration can be sensed by measuring the amplitud…
- Edisi
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- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
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Area-Array of 3-Arc-Fan Compliant Interconnects as Effective Drop-Impact Isol…
Abstract—Compliant off-chip interconnects as the first-level and second-level compliant interconnect structures are able to accommodate the differential displacement between the die and the substrate or between the substrate and the board due to their high in-plane and out-of-plane compliance. This paper presents experimental and simulation results of drop testing of silicon substrates with …
- Edisi
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- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- No. Panggil
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Approaching Roll-to-Roll Fluidic Self-Assembly: Relevant Parameters, Machine …
Abstract—This paper presents the implementation of an automated roll-to-roll fluidic self-assembly system based on the surface tension driven self-assembly with applications in the field of macroelectronics. The reported system incorporates automated agitation, web motion, component dispensing, and recycling. The process enables the assembly and electrical connection of semiconductor dies/chi…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
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An Electrochemical Microbubble-Based MEMS Pressure Sensor
Abstract—A novel pressure transducer concept is introduced in which external pressure variations induce changes in the volume of a trapped microbubble (μB) in an electrolyte solution. These volumetric changes are monitored by electrochemical impedance-based measurements and may be used for pressure tracking applications. Microbubbles are nucleated on-demand by electrolysis within a confinem…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
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